The John O’Brian Nanofabrication Laboratory is a central user, Class 1000 cleanroom dedicated to supporting the nanofabrication research efforts of USC researchers. Equipment includes: photolithography and e-beam lithography, metal deposition, silicon/SiON/oxide and III-V etchers, thin film deposition and growth, and a range of characterization and metrology tools.
University Park Campus
Vivian Hall of Engineering Building
3651 Watt Way, 1st floor
Los Angeles, CA 90089